Lateral Alignment of Epitaxial Quantum Dots (eBook)

The author was awarded the Philip-Morris Research Award in 2002.

Introduction 6
Contents 8
List of Contributors 12
Lateral Self-Alignment 17
General 18
1 Physical Mechanisms of Self-Organized Formation of Quantum Dots 19
2 Routes toward Lateral Self-Organization of Quantum Dots: the Model System SiGe on Si( 001) 63
Compact Lateral Quantum Dot Configurations 91
3 Short-Range Lateral Ordering of GeSi Quantum Dots Due to Elastic Interactions 92
4 Hierarchical Self-Assembly of Lateral Quantum- Dot Molecules Around Nanoholes 115
Ordering in Single Layers 137
5 Energetics and Kinetics of Self-Organized Structure Formation in Solution Growth: the SiGe/ Si System 138
6 Ge Quantum Dot Self-Alignment on Vicinal Substrates 205
7 Lateral Arrangement of Ge Self-Assembled Quantum Dots on a Partially Relaxed SixGe1 x Buffer Layer 219
8 Ordering of Wires and Self-Assembled Dots on Vicinal Si and GaAs ( 110) Cleavage Planes 239
Ordering by Layer Stacking 254
9 Stacking and Ordering in Self-Organized Quantum Dot Multilayer Structures 255
10 Self-Organized Anisotropic Strain Engineering for Lateral Quantum Dot Ordering 312
11 Towards Quantum Dot Crystals via Multilayer Stacking on Different Indexed Surfaces 331
Forced Alignment 352
Growth on Shallow Modulated Surfaces 353
12 One-, Two-, and Three-Dimensionally Ordered GeSi Islands Grown on Prepatterned Si ( 001) Substrates 355
13 Ordered SiGe Island Arrays: Long Range Material Distribution and Possible Device Applications 375
14 Nanoscale Lateral Control of Ge Quantum Dot Nucleation Sites on Si( 001) Using Focused Ion Beam Implantation 399
15 Ge Nanodroplets Self-Assembly on Focused Ion Beam Patterned Substrates 430
16 Metallization and Oxidation Templating of Surfaces for Directed Island Assembly 442
17 Site Control and Selective-Area Growth Techniques of InAs Quantum Dots with High Density and High Uniformity 463
18 In(Ga)As Quantum Dot Crystals on Patterned GaAs( 001) Substrates 489
Growth on Surface Modulations of High Amplitude 512
19 Directed Arrangement of Ge Quantum Dots on Si Mesas by Selective Epitaxial Growth 514
20 Directed Self-Assembly of Quantum Dots by Local- Chemical- Potential Control via Strain Engineering on Patterned Substrates 521
21 Structural and Luminescence Properties of Ordered Ge Islands on Patterned Substrates 538
22 Formation of Si and Ge Nanostructures at Given Positions by Using Surface Microscopy and Ultrathin SiO2 Film Technology 563
23 Pyramidal Quantum Dots Grown by Organometallic Chemical Vapor Deposition on Patterned Substrates 584
24 Large-Scale Integration of Quantum Dot Devices on MBE- Based Quantum Wire Networks 632
25 GaAs and InGaAs Position-Controlled Quantum Dots Fabricated by Selective- Area Metalloorganic Vapor Phase Epitaxy 658
26 Spatial InAs Quantum Dot Positioning in GaAs Microdisk and Posts 684