Plasma-Aided Nanofabrication (eBook)

Dr. Ken Ostrikov, now at the University of Sydney, has been with numerous R&D institutions worldwide. His research topics include chemically active plasmas for nanofabrication, synthesis of functional materials and bio-compatible coatings, development of industrial process specifications and integrated plasma facilities for materials synthesis and surface modification, as well as several fundamental topics. Dr. Ostrikov's work was honored several times and published in more than 200 papers in international journals and conference proceedings. Shuyan Xu, Nanyang Technological University, is the founding Leader of his research center. Professor Xu's research interests include development of plasma sources for surface processing and modification, materials deposition and low-energy ion implantation, plasma- aided bioceramic coatings, plasma assembly of nanostructures, as well as modelling and simulation of chemically active plasma-grown nanoparticles and nanocluster dynamics and self-organization processes. Professor Xu has published more than 180 papers.

1 Introduction
2 What Makes Low-Temperature Plasmas a Versatile Nanotool?
3 Specific Examples and Practical Framework
4 Generation of Building andWorking Units
5 Transport, Manipulation, and Deposition of Building and Working Units
6 Surface Science of Plasma-Exposed Surfaces and Self-Organization Processes
7 Ion-Focusing Nanoscale Objects
8 Building and Working Units at Work: Applications in Nanoscale Materials Synthesis and Processing
9 Conclusions and Outlook
10 Appendix A. Reactions and Rate Coefficients in Low-Temperature PECVD of Carbon Nanostructures
11 Appendix B. Why plasma-based nanoassembly: many more reasons